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History

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 | 1984~ | 1990~ | 2000~ | 2010~ |
1984 Established to manufacture clothing by Capital 3,000,000 yen
(Kusado-cho Fukuyama-city Hiroshima JAPAN)
1995 Electronics Division was established in September
Capital increased to 7,000,000 yen in November In December, the capital to 10,000,000 yen
1996 Sales or production, exploitation of Digital Storage UNIT
Start the repair of RF MATCHING BOX
Sales and production, exploitation of RF GENERATOR (300W)
1997 Start the repair of RF GENERATOR
Sales and production, exploitation of RF GENERATOR (600W)
Sales and production, exploitation of SYSTEM CONTROLLER
1998 P-5000 CSG-1000 RF Complete Set(RF GENERATOR + RF MATCHING BOX)
Sales and production, exploitation of RF MATCHING BOX (16bit CPU)
RF MATCHING Control software development
TECHNOLOGY Center newly established in Fukuyama-city Kawaguchi-cho.
1999 P-5000 Exhibit at SEMICON Japan'99
Sales and production, exploitation of RF Power TESTER (13.56MHz、2KW)
Sales and production, exploitation of RF MATCHING BOX (32bit CPU)
SM-1000,SM-2000,SM-3000

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2000 SG-2000 Exhibit at SEMICON TAIWAN
Sales and production, exploitation of RF MATCHING BOX
SMA-1000 ETCH (32bit CPU) SMA-1000 CVD (32bit CPU)
Sales and production, exploitation of SG-2000、SG-3000 (32bit CPU RF GENERATOR)
Repair and exploitation of MAGNETRON HEAD (ASTEX)
TECHNOLOGY Center newly established in Fukuyama-city Matsunaga-cho
2001 P-5000 SUNSAY Generic Co., LTD that had aimed at exploitation and
sales of the high frequency pressure machine was established.
Therefore, SUNSAY Industries Co., LTD. takes charge of manufacturing and maintenance.
CSG-600Ⅱ((32bit CPU) RF Complete set
Start the repair of PVD RF MATCHING BOX.
Start the repair of CVD Heater UNIT
Start the repair of CVD Driver UNIT
Start the repair of Lamp Driver UNIT.
Sales and exploitation of SML-1250DSQ (TCP DSQ RF MATCHING SYSTEM)
Exhibit at FINETECH JAPAN,SEMICON TAIWAN and SEMICON JAPAN.
Start the repair of MAGNETRON HEAD (ASTEX)
Sales and exploitation of Low-cost kit for P-5000 RF MATCHING SYSTEM
2002 SMA-1000D SM-2500 and SMA-1000D developed for DPS MATCHING SYSTEM.
SML-1250PT exploitation of TCP RF MATCHING SYSTEM
Sales and exploitation of low cost MATCHING BOX.
Exhibit at SEMICON TAIWAN and SEMICON JAPAN
Start the repair of sputtering system (PVD RF GENERATOR)
Start the repair of MAGNETRON HEAD (ASTEX)
2003 RF-TESTER Sales and exploitation of RF MATCHING SYSTEM for HDP,CVD
Start the repair of DC GENERATOR for PVD
Sales and exploitation of Mechanical Drive ROBOT for P-5000 SYSTEM
Exhibit at SEMICON TAIWAN and SEMICON JAPAN
Sales and exploitation of thin blade for P-5000 etching process
Start the repair of MAGNETRON Controller.
Compact RF POWER TESTER for the interlock. Corresponds to the USB
TECHNOLOGY Center newly established in Fukuyama-city Myououdai
2004 RF-TESTER Sales and exploitation of RF MATCHING SYSTEM (TCP BOTTOM)
Exhibit at SEMICON JAPAN and SEMICON TAIWAN
Sales and exploitation of High Vacuum ROBOT for P-5000 SYSTEM
Sales and exploitation of long life and high torque motor for ROBOT
Repair of Heat Exchanger, Upgrade product development, sales.
Sales and exploitation of Process Gas Radical UNIT.
2005 CENTURA Sales and exploitation of long life high vacuum Mechanical ROBOT
Sales and exploitation of RF SYSTEM for Centura DPN
Exhibit at SEMICON JAPAN and SEMICON TAIWAN
Factory, Parts Center and Design Center newly established in Fukuyama-city Shingai-cho
2006 new Parking TECHNOLOGY Center newly established in Shingai-cho Fukuyama-city (And new Parking)
Centura HP ROBOT development, and sales
Sales and exploitation of RF SYSTEM for Centura DPS-2 (Poly / Metal)
SSD PCB, Upgrade product development, sales
Sales and exploitation of RF SYSTEM(TCP / BIAS) for Lam VersyKiyo(300mm)
Exhibit at SEMICON JAPAN and SEMICON TAIWAN
2007 image Sales and exploitation of VHP types of ROBOT
Sales and exploitation of RF SYSTEM for Centura E-Max(RIE)
Sales and exploitation of RF SYSTEM for Centura HDP 300mm.
Sales and exploitation of RF SYSTEM(TCP / BIAS) for Lam Versy Metal(300mm)
Sales and exploitation of AMAT VME SSD SYSTEM
Sales and exploitation of LCD SYSTEM for AMAT P-5000, Centura and Endura
Exhibit at SEMICON JAPAN and SEMICON TAIWAN
2008 clean room New clean room at headquarters factory
High vacuum, High precision, Monoblock AL, Shaving Vacuum Chamber (corner 1000mm) established
High vacuum, High precision, Monoblock AL, Shaving Vacuum Chamber (corner 1500mm) established
Stone plate installed for High precision ROBOT
Established two types of high-precision leak detector altitude record
Remote plasma experimental device
Sales and exploitation of RF SYSTEM(TCP / BIAS) for Lam Versy 45(300mm)
Sales and exploitation of RF SYSTEM for Lam EXELAN(300mm)
Develop a system of Novellus speed(C300), selling
Exhibit at SEMICON JAPAN and SEMICON TAIWAN
2009 image Headquarters plant acquired ISO14001 certification. Environmental measures, carried out the renovation of energy saving insulation airtight
Environmental measures, renovated in ultra energy-saving air conditioning
in all. (50% lower power consumption)
Sales and exploitation of Fixd Match + RF Generator SYSTEM for AMAT Producer 300mm.
Sales and exploitation of TCP Bias RF SYSTEM for Lam Versys 45 Versys3x 2X 300mm
Sales and exploitation of Lam Exelan 300mm 3x 2X SYSTEM.
Sales and exploitation of Novellus ALtus RF SYSTEM.
Sales and exploitation of Novellus Vector RF SYSTEM.
Sales and exploitation of Solar backsheet Production SYSTEM
Sales and exploitation of Solar LCD sheet take up SYSTEM
Exhibit at SEMICON JAPAN and SEMICON TAIWAN

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2010 image Technology Center acquired ISO14001 certification.
Environmental measures, carried out the renovation of energy saving insulation airtight
In Technology Center,Environmental measures, renovated in ultra
energy-saving air conditioning in all. (50% lower power consumption)
In Technology Center,Ultra energy-saving renovation to
the elevator (30% reduction in power consumption)
In Technology Center,renovated water-saving toilets (water saving 50%)
In Head Office and Factory,renovated water-saving toilets (water saving 50%)
In Head Office and Factory,pair insulated glass restored (10% lower power consumption)
Sales and exploitation of SEME PhotoMask Manufacturing SYSTEM.
Sales and exploitation of Fixd Match + RF Generator SYSTEM for AMAT HDP 300mm.
Sales and exploitation of TCP Bias RF SYSTEM for Lam Versys 45 Versys C3 3×2X 300㎜
Sales and exploitation of Lam Exelan 300㎜+H 3X 2X SYSTEM
Exploitation of TEL Ox SYSREM.
Sales and exploitation of Solar Backsheet manufacturing temperature control SYSTEM
Sales and exploitation of Micro X-ray diagnostic apparatus system for producing medical devices
2011 image Sales and exploitation of RF MATCHING SYSTEM for Lam EXELAN 27MHz/2MHz
Sales and exploitation of High Speed RF TESTER Ver2 (27MHz/2MHz)
Sales and exploitation of Canon STRIP RF MATCHING SYSTEM
Sales and exploitation of RF MATCHING SYSTEM for Mobile LCD
For environmental measures introduced solar system(10kw)
Exhibit at SEMI Forum Japan in 2011
Have speech, microfabrication technology
Have speech, For 2x~ 3x ETCHING SYSTEM
Presented the high-pressure ICP PLASMA SYSTEM
2012 The head office changed into RF lighting for power saving.
30% power-saving implementation.
10Kw solar cell SYSTEM introduction.
The Strong hybrid vehicle is introduced.
The 40% of amount reduction of the energy used.
Sales and exploitation of Lam EXELAN Flex-Ⅲ 27MHz/2MHz MATCHING SYSTEM.
Sales and exploitation of TEL VESTA 10MHz/32MHz MATCHING SYSTEM.
Sales and exploitation of Lam Versys 45-Ⅱ MATCHING SYSTEM.
Sales and exploitation of ULVAC LCD MATCHING SYSTEM.
Sales and exploitation of AKT LCD MATCHING SYSTEM.
SUNSAY presented PLASMA SYSTEM research at the electric discharge society.

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Information of each center (SUNSAY GENERIC, Development branch)
  • Head Office/Factory
    2-14-3 Shingai-cho Fukuyama-city Hiroshima 721-0955 Japan
    Tel:+81-84-981-2770
    Fax:+81-84-981-2780
    Map
  • Technology Center
    2-14-3 Shingai-cho Fukuyama-city Hiroshima 721-0955 Japan
    Tel:+81-84-981-2770
    Fax:+81-84-981-2780
    Map
  • Parts Center
    1-3 Myououdai Fukuyama-city Hiroshima 720-0834 Japan
    Tel:+81-84-949-2740
    Fax:+81-84-949-2750
    Map
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