| 1984 | Established to manufacture clothing ｂｙ Capital 3,000,000 yen (Kusado-cho Fukuyama-city Hiroshima JAPAN) |
| 1995 | Electronics Division was established in September Capital increased to 7,000,000 yen in Novembeｒ In December, the capital to 10,000,000 yen |
| 1996 | Sales or production, exploitation of Digital Storage UNIT Start the repair of RF MATCHING BOX Sales and production, exploitation of RF GENERATOR (300W) |
| 1997 | Start the repair of RF GENERATOR Sales and production, exploitation of RF GENERATOR (600W) Sales and production, exploitation of SYSTEM CONTROLLER |
| 1998 | 
CSG-1000 RF Complete Set(RF GENERATOR + RF MATCHING BOX)Sales and production, exploitation of RF MATCHING BOX (16bit CPU) RF MATCHING Control software development TECHNOLOGY Center newly established in Fukuyama-city Kawaguchi-cho. |
| 1999 | 
Exhibit at SEMICON Japan'99Sales and production, exploitation of RF Power TESTER (13.56MHz、2KW) Sales and production, exploitation of RF MATCHING BOX (32bit CPU) SM-1000,SM-2000,SM-3000 |
| 2000 | 
Exhibit at SEMICON TAIWANSales and production, exploitation of RF MATCHING BOX SMA-1000 ETCH (32bit CPU) SMA-1000 CVD (32bit CPU) Sales and production, exploitation of SG-2000、SG-3000 (32bit CPU RF GENERATOR) Repair and exploitation of MAGNETRON HEAD (ASTEX) TECHNOLOGY Center newly established in Fukuyama-city Matsunaga-cho |
| 2001 | 
SUNSAY Generic Co., LTD that had aimed at exploitation andsales of the high frequency pressure machine was established. Therefore, SUNSAY Industries Co., LTD. takes charge of manufacturing and maintenance. CSG-600Ⅱ((32bit CPU) RF Complete set Start the repair of PVD RF MATCHING BOX. Start the repair of CVD Heater UNIT Start the repair of CVD Driver UNIT Start the repair of Lamp Driver UNIT. Sales and exploitation of SML-1250DSQ (TCP DSQ RF MATCHING SYSTEM) Exhibit at FINETECH JAPAN,SEMICON TAIWAN and SEMICON JAPAN. Start the repair of MAGNETRON HEAD (ASTEX) Sales and exploitation of Low-cost kit for P-5000 RF MATCHING SYSTEM |
| 2002 | 
SM-2500 and SMA-1000D developed for DPS MATCHING SYSTEM.SML-1250PT exploitation of TCP RF MATCHING SYSTEM Sales and exploitation of low cost MATCHING BOX. Exhibit at SEMICON TAIWAN and SEMICON JAPAN Start the repair of sputtering system (PVD RF GENERATOR) Start the repair of MAGNETRON HEAD (ASTEX) |
| 2003 | 
Sales and exploitation of RF MATCHING SYSTEM for HDP,CVDStart the repair of DC GENERATOR for PVD Sales and exploitation of Mechanical Drive ROBOT for P-5000 SYSTEM Exhibit at SEMICON TAIWAN and SEMICON JAPAN Sales and exploitation of thin blade for P-5000 etching process Start the repair of MAGNETRON Controller. Compact RF POWER TESTER for the interlock. Corresponds to the USB TECHNOLOGY Center newly established in Fukuyama-city Myououdai |
| 2004 | 
Sales and exploitation of RF MATCHING SYSTEM (TCP BOTTOM)Exhibit at SEMICON JAPAN and SEMICON TAIWAN Sales and exploitation of High Vacuum ROBOT for P-5000 SYSTEM Sales and exploitation of long life and high torque motor for ROBOT Repair of Heat Exchanger, Upgrade product development, sales. Sales and exploitation of Process Gas Radical UNIT. |
| 2005 | 
Sales and exploitation of long life high vacuum Mechanical ROBOTSales and exploitation of RF SYSTEM for Centura DPN Exhibit at SEMICON JAPAN and SEMICON TAIWAN Factory, Parts Center and Design Center newly established in Fukuyama-city Shingai-cho |
| 2006 | 
TECHNOLOGY Center newly established in Shingai-cho Fukuyama-city (And new Parking)Centura HP ROBOT development, and sales Sales and exploitation of RF SYSTEM for Centura DPS-2 (Poly / Metal) SSD PCB, Upgrade product development, sales Sales and exploitation of RF SYSTEM(TCP / BIAS) for Lam VersyKiyo(300mm) Exhibit at SEMICON JAPAN and SEMICON TAIWAN |
| 2007 | 
Sales and exploitation of VHP types of ROBOTSales and exploitation of RF SYSTEM for Centura E-Max(RIE) Sales and exploitation of RF SYSTEM for Centura HDP 300mm. Sales and exploitation of RF SYSTEM(TCP / BIAS) for Lam Versy Metal(300mm) Sales and exploitation of AMAT VME SSD SYSTEM Sales and exploitation of LCD SYSTEM for AMAT P-5000, Centura and Endura Exhibit at SEMICON JAPAN and SEMICON TAIWAN |
| 2008 | 
New clean room at headquarters factoryHigh vacuum, High precision, Monoblock AL, Shaving Vacuum Chamber (corner 1000mm) established High vacuum, High precision, Monoblock AL, Shaving Vacuum Chamber (corner 1500mm) established Stone plate installed for High precision ROBOT Established two types of high-precision leak detector altitude record Remote plasma experimental device Sales and exploitation of RF SYSTEM(TCP / BIAS) for Lam Versy 45(300mm) Sales and exploitation of RF SYSTEM for Lam EXELAN(300mm) Develop a system of Novellus speed(C300), selling Exhibit at SEMICON JAPAN and SEMICON TAIWAN |
| 2009 | 
Headquarters plant acquired ISO14001 certification. Environmental measures, carried out the renovation of energy saving insulation airtightEnvironmental measures, renovated in ultra energy-saving air conditioning in all. (50% lower power consumption) Sales and exploitation of Fixd Match + RF Generator SYSTEM for AMAT Producer 300mm. Sales and exploitation of TCP Bias RF SYSTEM for Lam Versys 45 Versys3x 2X 300mm Sales and exploitation of Lam Exelan 300mm 3x 2X SYSTEM. Sales and exploitation of Novellus ALtus RF SYSTEM. Sales and exploitation of Novellus Vector RF SYSTEM. Sales and exploitation of Solar backsheet Production SYSTEM Sales and exploitation of Solar LCD sheet take up SYSTEM Exhibit at SEMICON JAPAN and SEMICON TAIWAN |
| 2010 | 
Technology Center acquired ISO14001 certification. Environmental measures, carried out the renovation of energy saving insulation airtight In Technology Center,Environmental measures, renovated in ultra energy-saving air conditioning in all. (50% lower power consumption) In Technology Center,Ultra energy-saving renovation to the elevator (30% reduction in power consumption) In Technology Center,renovated water-saving toilets (water saving 50%) In Head Office and Factory,renovated water-saving toilets (water saving 50%) In Head Office and Factory,pair insulated glass restored (10% lower power consumption) Sales and exploitation of SEME PhotoMask Manufacturing SYSTEM. Sales and exploitation of Fixd Match + RF Generator SYSTEM for AMAT HDP 300mm. Sales and exploitation of TCP Bias RF SYSTEM for Lam Versys 45 Versys C3 3×2X 300㎜ Sales and exploitation of Lam Exelan 300㎜+H 3X 2X SYSTEM Exploitation of TEL Ox SYSREM. Sales and exploitation of Solar Backsheet manufacturing temperature control SYSTEM Sales and exploitation of Micro X-ray diagnostic apparatus system for producing medical devices |
| 2011 | 
Sales and exploitation of RF MATCHING SYSTEM for Lam EXELAN 27MHz/2MHzSales and exploitation of High Speed RF TESTER Ver2 (27MHz/2MHz) Sales and exploitation of Canon STRIP RF MATCHING SYSTEM Sales and exploitation of RF MATCHING SYSTEM for Mobile LCD For environmental measures introduced solar system(10kw) Exhibit at SEMI Forum Japan in 2011 Have speech, microfabrication technology Have speech, For 2x～ 3x ETCHING SYSTEM Presented the high-pressure ICP PLASMA SYSTEM |
| 2012 |
The head office changed into RF lighting for power saving. 30% power-saving implementation. 10Kw solar cell SYSTEM introduction. The Strong hybrid vehicle is introduced. The 40% of amount reduction of the energy used. Sales and exploitation of Lam EXELAN Flex-Ⅲ 27MHz/2MHz MATCHING SYSTEM. Sales and exploitation of TEL VESTA 10MHz/32MHz MATCHING SYSTEM. Sales and exploitation of Lam Versys 45-Ⅱ MATCHING SYSTEM. Sales and exploitation of ULVAC LCD MATCHING SYSTEM. Sales and exploitation of AKT LCD MATCHING SYSTEM. SUNSAY presented PLASMA SYSTEM research at the electric discharge society. |
| 2013 |
IEEDJ Electric Discharge Society Annual General Meeting Keynote Speech, Plasma RF Generator paper published IEEDJ Electrical Discharge Society Annual Meeting Keynote Speech, Bosh Process ICP Plasma Paper LCD 7.5KW RF Match, RF Generator Ver UP release |
| 2014 |
IEEDJ Electric Discharge Society Annual General Meeting Keynote Speech, Plasma RF Generator paper published IEEDJ Electrical Discharge Society Annual Meeting Keynote Speech, Bosh Process ICP Plasma Paper Bosh Process RF Match, RF Generator Ver UP release Introduction of LED lighting equipment throughout the building |
| 2015 |
IIEEDJ Electric Discharge Society Annual General Meeting Keynote Speech, Plasma RF Generator paper published IEEDJ Electrical Discharge Society Annual Meeting Keynote Speech, Bosh Process ICP Plasma Paper RFG RF Generator Version UP release Apex RF Generator ver UP release GMW-, GMW-RF Generator Ver UP |
| 2016 |
IEEDJ Electric Discharge Society Annual General Meeting Keynote Speech, Plasma RF Generator paper published IEEDJ Electrical Discharge Society Annual General Meeting Keynote Speech, IC Plasma paper published 300mm Lam Exelan Felix GX RF Match, RF Generator Ver UP release 300mm TEL Vegas RF Match, RF Generator Ver UP release NOVA25, NOVA50 RF Generator Version UP GHW50 RF Generator Ver UP |
| 2017 |
IEEJ Institute of Electrical Engineers Division A Fundamentals, Logic, "Push-Pull MOS-FETs in Plasma Generation Power Supplies Power Conversion Efficiency and Power Loss of Inverters,” Transactions of the Institute of Electrical Engineers of Japan Vol.136 No.8 D, pp.511-521(2016). IEEJ Institute of Electrical Engineers Division D Industrial Division "Stabilization of Impedance Matching System Using RF Transformer". The Transactions of the Institute of Electrical Engineers of Japan, Vol.136, No.7A, pp.404-408(2016). IEEDJ Electric Discharge Society Annual Meeting Keynote Speech, Plasma RF Generator paper published IEEDJ Electric Discharge Society Annual Meeting Keynote Speech, Bosh Process ICP Plasma Paper Acquisition of land for head office second factory 800 tsubo |
| 2018 |
Opened Onomichi Design Center (5F) 150 tsubo Headquarters second factory land preparation LCD 8.5G RF Generator 30KW development, manufacturing and maintenance LCD 10.5G RF equipment introduction AC380-500V 100KW Power supply equipment、50KW RF Dummy Load Introduction of RF Power Meter Developed and manufactured ESC for 300mm ETCHING SYSTEM |
| 2019 |
Developed and sold RF Matching Box + RF Generator + RF Sensor for cancer high-frequency treatment (65% domestic share covered by health insurance) 300mm RPS system maintenance and development Development, manufacturing and sales of MKS RF Generator higher compatible machine for 300mm Development, manufacturing and sales of AE RF Generator higher compatible machine for 300mm |
| 2020 |
High-frequency power measuring instrument, OEM sales development 1000 or more achievements Development, manufacture and sale of energy-saving RF generator for 200mm RF Sensor OEM development, manufacturing and sales for 300mm (more than 1000 units) |
| 2021 |
Completion of R&D Center (2000㎡) Developed and sold RF Generator for 200/300mm HDP CVD Lam System Introducing the latest RF measurement system 300mm ESC high voltage power supply development, manufacturing and sales |
| 2022 |
R&D center opened Next-generation energy saving (implemented in April 2022 New Energy Conservation Act first compliance) Double glass + next-generation insulation (120mm) Urethane insulation + double-folded roof (double insulation) Next-generation geothermal cooling water system introduction 800ℓ/min 200/300/380/400/440/480/500V compatible large power supply introduced (600KVA/250KVA) Introduced a 2-ton inverter type overhead crane Introduced inverter type elevator 450kg Introduction of barrier-free design Introduction of energy-saving air conditioners Full introduction of waste-free tiles Introduced a strong earthquake-resistant structure (grid construction method) Development and sales of RF Generator for 200/300mm HDP CVD AMAT System Introduced the latest CAD system (mechanical/electrical/structural) Introduced the latest AO/AI Proctor system for CAD Introduction of remote conference system Introduced corona countermeasure ventilation system Corona measures, separate conference rooms (3rooms) / meeting rooms (2rooms) |
| 2023 |
128KW RF generator development and manufacturing Introduced the latest automatic fire alarm system at head office, head office factory, and technology center Company-wide introduction of disaster prevention system, uninterruptible power supply (UPS), disaster prevention goods (water, food, etc.) Introduction of lithium-ion batteries |
Head Office/Factory
2-14-3 Shingai-cho Fukuyana-city Hiroshima 721-0955 Japan
Tel:+81-84-981-2770
Fax:+81-84-981-2780
R&D center
2-15-31 Shingai-cho Fukuyana-city Hiroshima 721-0955 Japan
Tel:+81-84-981-2770
Fax:+81-84-981-2780
Technology center
2-14-3 Shingai-cho Fukuyana-city Hiroshima 721-0955 Japan
Tel:+81-84-981-2770
Fax:+81-84-981-2780
Design center
1-13-12 Tuthido Onomiti-city Hiroshima 722-0035 Japan
Tel:+81-84-981-2770
Fax:+81-84-981-2780
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