New development and a challenge of RF power source machines
≪Process window expansion which made full use of digital circuit technology and soft treatment technology≫
1. Company brochure
SUNSAY was established as a Hiroshima factory of a fiber enterprise in 1984, and the semiconductor section was also established in 1995.
It's unified to development manufacture of semiconductor associated equipment in 1998, and continues till today.
Major products are RF power supply, RF MATCHING BOX and a gas radical power supply, a process chamber RF interlock system, RF electric power measuring instrument, etc. SUNSAY has measured company deployment focusing on the associated equipment, manufacture development to latest process of semiconductor, and manufacture.

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